Title NanoSkills : Training new skills for the new jobs in nanotechnologies
Project Number 510591-LLP-1-2010-FR-LEONARDO-LMP
Product Scanning probe microscopy applications for nanoelectronics
Title Scanning probe microscopy applications for nanoelectronics
Product Type open and distance learning
A training to get:
- knowledge on the fundamentals of scanning-probe microscopy and of their place in the present development of nanoscience and nanotechnology.
- knowledge on the instrumental components of scanning tunnelling microscopy and of atomic force microscopy, as well as on actuation and detection methods for nano-and microdisplacement.
Scanning Probe Microscopy (SPM) methods like Scanning Tunneling Microscopy (STM) and Atomic Force Microscopy (AFM) provide insight into nano- and microstructures at surfaces. In the field of nano- and microelectronic they are of high interest not only in fundamental research but also for material and surface control towards industrial processes and production improvement in nano- and microelectronic device fabrication. In contrary to scanning electron microscopy, scanning probe microscopy allows to image submicron and nanometerscale structures together with their topographical (height) information and to analyse surface roughness. Furthermore, the local electronic properties at a device surface can be revealed from scanning tunnelling microscopy measurements.
These instruments rely on the precise nano- and microdisplacement which itself can be realised by nano- and microelectronic devices. Examples are MEMS integrated actuators and sensors, with e.g. integrated AFM cantilevers or microgrippers.
This module gives an introduction to the scanning probe microscopy methods SPM and AFM and their applications in the field of nano- and microelectronics, and explains the working principle of nano- and microdisplacement and its detection principles; examples of MEMS integrated sensors and actuators are presented. The module enables the learner to be prepared for starting practical laboratory work with scanning probe microscopy in the field of nano- and microelectronic applications.
Target group Technicians or engineers already working in microelectronics and expecting to extend their skills
Being able to manage the use of scanning force microscopy technique according to the sample specificities and nature.
Ability to manage and start practical work with an STM or AFM instrument, to detect typical artefacts in scanning, and to perform basic data analysis.
Area of application Ability to select the suitable scanning force microscopy technique and to choose the working mode in function of the characterisation needs.