Title Modular teaching and learning offers for contemporary and needed further education
Project Number D/04/B/F/PP-146 157
Product Microsystem based on GaAs micromechanical structures for gas detection
Title Microsystem based on GaAs micromechanical structures for gas detection
Product Type modules
Gas sensitive microsystem based on GaAs microstructures for handheld battery operated integrated system was designed and fabricated. Complet chemical, oprical and electrical characterization of this structure was realized. The system was designed for detection of dangerous gases in health care and safety and quality control in industry.
Research centre, universities, industry
The aim of this project is an integrated, battery operated handheld gas sensitive sensor structure. Gas sensitive microsystem based on GaAs microstructures was designed and fabricated. An 300 um GaAs substrate was used. An NiO thin layer was chosen as the sensitive layer. Interdigitated electrodes under the NiO layer are designed for resistance measurements. The NiO layer has high operating temperatures, therefore a Pt heating meander is included. An polyimid insulating layer for electrical insulation of IDT electrodes and heating meander structure is included. Whole structure is placed on closed membrane structure to minimalize heat losses through substrate. Complet optical, chemical and electrical characterization was made and several optimalization steps were applied. Thermal properties and mechanical stabilization of new optimized structure were simulated. The next point of our research is fabrication and characterization of optimized sensor structure.
Area of application
Detection of dangerous gases in health care and safety and quality control in industry